Compatible carriers
(FOUP, FOSB, OC) |
SEMI-compliant ø300mm wafer carriers
200mm wafer carriers (with dedicated adapter) |
| Stroke |
Measuring head (X x Y x Z) |
480 x 180 x 400 mm (18.9 x 7.1 x 15.7 in.) |
| Rotary table |
360° (in 90° increments) |
| Minimum readout |
0.1µm |
| Head travel speed |
XZ axis: max. 200mm/s (7.9 in.)
Y axis: max. 50mm/s (2.0 in.) |
|
Kinematic plate rotation speed
|
90°/2 sec. |
| Camera |
B&W 1/2-in. CCD |
| Optical magnification |
0.27X to 2.74X (5-step 10X zoom) |
| Field of view |
20 x 16 mm to 2.0 x 1.6 mm |
| Max. workpiece weight |
15kg (33.1 lb.) |
| Measuring accuracy |
(10 + 10L/1000)µm, L = measuring length in mm) |
| Repeatability (2σ) |
2µm |
| Illumination |
Episcopic, diascopic, darkfield |
| Auto focus |
Laser AF, Vision AF |
| Power source |
AC100-240V±10%, 50/60Hz |
| Power consumption (approx.) |
AC100-120V: 13A (main unit), 9A (PC)
AC200-240V: 7A (main unit), 5A (PC) |
| Dimensions |
1400 (W) x 1739 (D) x 2530 (H) mm (55.1 x 68.5 x 99.6 in.) |
| Weight |
Approx. 1400kg (3086.41 lb.) |
| Host computer |
IBM PC/AT (Windows®2000) |
| Monitor |
17-in. TFT |
