| Stroke (XxYxZ) |
|
| |
With high magnification lens |
650 x 550 x 150 mm (25.6 x 21.7 x 5.9 in.) |
| |
With low magnification lens |
600 x 550 x 150 mm (23.6 x 21.7 x 5.9 in.) |
| Minimum readout |
0.1µm |
| Maximum workpiece weight |
30kg (66.1 lb) |
| Measuring accuracy |
|
| |
U1X, U1Y |
1.5 + 2.5L/1000µm (with a workpiece max. 30kg) |
| |
U2XY |
2.5 + 2.5L/1000µm (with a workpiece max. 30kg) |
| Z-axis (L: Length in mm < W.D.) |
1.5 + L/150µm |
| Camera |
B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD |
| Working distance |
High mag. objective lens: 9.8mm
Low mag. objective lens: 32mm |
| Magnification vs field of view |
1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm |
| Auto focus |
TTL Laser AF and Vision AF |
| Illumination |
Episcopic, diascopic (with high mag. head only), darkfield illumination |
| Power source |
AC100-240V±10%, 50/60Hz |
| Power consumption |
Max. 15A |
| Dimensions & weight |
|
| |
Main unit & table |
1220 (W) x 1680 (D) 1750 (H) mm, approx. 600kg (48.0 x 66.1 x 68.9 in., 1322.8 lb.) |
| |
Controller |
250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.) |
| Footprint |
2400 (W) x 2000 (D) mm (94.5 x 78.7 in.) |
| Host Computer |
| Main unit |
IBM PC/AT (Windows®2000) |
| Monitor |
17-in. TFT color |
