Nikon
Standard Magnification Head Maximum Magnification Module

VMR-3020 Z120X

Its maximum magnification module achieves measurements of fine workpieces. Perfect for measurements of topical MEMS parts, high-density PCBs and semiconductor packages.

Applications
High-density PCBs
Exposure masks for substrates
Packages (2D + height)
MEMS parts

•Maximum magnification module and high-precision stage enable accurate measurements of large geometry workpieces and minute shapes
•Laser AF with minute laser spots provides accurate measurements of small cross-sectional shapes
•Optional surface analysis software displays 3D shapes of MEMS parts

Specifications

Stroke (XxYxZ)  
  With high magnification lens 300 x 200x 150 mm (11.8 x 7.9 x 5.9 in.)
  With low magnification lens 250 x 200x 150 mm (9.8 x 7.9 x 5.9 in.)
Minimum readout 0.1µm
Maximum workpiece weight 20kg (44.0 lb)
Measuring accuracy  
  U1X, U1Y 1.5 + 4L/1000µm (with a workpiece max. 5kg)
  U2XY 2.5 + 4L/1000µm (with a workpiece max. 5kg)
Z-axis (L: Length in mm < W.D.) 1.5 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance High mag. objective lens: 9.8mm
Low mag. objective lens: 32mm
Magnification vs field of view 1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm
Auto focus TTL Laser AF and Vision AF
Illumination Episcopic, diascopic (with high mag. head only), darkfield illumination
Power source AC100-240V±10%, 50/60Hz
Power consumption Max. 13A
Dimensions & weight  
  Main unit only 625 x 728 x 1195 mm, approx. 200kg
(24.6 x 28.7 x 47.0 in., 441.0 lb.)
  Main unit & table 690 x 730 x 1725 mm, approx. 240kg
(27.2 x 28.7 x 67.9 in., 529.1 lb.)
  Controller 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2100 (W) x 1100 (D) mm (82.7 x 43.3 in.)
Host Computer
Main unit IBM PC/AT (Windows®2000)
Monitor 17-in. TFT color
*The "Z120X" type is equivalent to the " Z120X" type in Japan.

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•For inquiries about these products
Measurement Examples
Laser scan on bonding wire
Laser scan on bonding wire
Package
Package
CCD
CCD
Bonded ball
Bonded ball
Loop cross section
Loop cross section

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