Nikon
Standard Magnification Head Maximum Magnification Module

VMR-3020

The standard model of the NEXIV series. It handles a variety of measurement tasks including those for mechanical parts, molded parts, stamped parts and various other workpieces.

Applications
Semiconductor packages
Substrates
Stamped parts
Connectors
Injection molded parts

•Variety of illumination choices facilitate accurate detection of edges in molded parts
•Long working distance (50mm) permits measurements of parts with big height gaps
•15X zoom provides universal applications while facilitating easy search at low magnifications and accurate measurements at high magnifications
•User-friendly software
•Laser AF facilitates evaluations of cross-sectional shapes and 3D profiling as well as the flatness of workpiece surfaces

Specifications

Stroke (XxYxZ) 300 x 200x 150 mm (11.8 x 7.9 x 5.9 in.)
Minimum readout 0.1µm
Maximum workpiece weight 20kg (44.0 lb)
Measuring accuracy  
  U1X, U1Y 1.5 + 4L/1000µm (with a workpiece max. 5kg)
  U2XY 2.5 + 4L/1000µm (with a workpiece max. 5kg)
Z-axis (L: Length in mm < W.D.) 1.5 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance 50mm
Magnification vs field of view  
  Optical Head for Type 1 0.5 - 7.5X / 9.33 x 7 - 0.622 x 0.467 mm
  Optical Head for Type 2 1 - 15X / 4.67 x 3.5 - 0.311 x 0.233 mm
  Optical Head for Type 3 2 - 30X / 2.33 x 1.75 - 0.155 x 0.117 mm
Auto focus TTL Laser AF and Vision AF
Illumination Diascopic, episcopic, 8-segment LED ring illumination (inner ring / outer ring)
Power source AC100-240±10%, 50/60Hz
Power consumption Max. 11A
Dimensions & weight  
  Main unit only 625 x 728 x 1195 mm, approx. 200kg
(24.6 x 28.7 x 47.0 in., 441.0 lb.)
  Main unit & table 690 x 730 x 1725 mm, approx. 240kg
(27.2 x 28.7 x 67.9 in., 529.1 lb.)
  Controller 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2100 (W) x 1100 (D) mm (82.7 x 43.3 in.)
Host Computer
Main unit IBM PC/AT (Windows®2000)
Monitor 17-in. TFT color

•To request a brochure
•For inquiries about these products
Measurement Examples
Connector
Connector
PGA
PGA
Plastic gear
Plastic gear
Rubber keypad
Rubber keypad

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