NEXIV VMR Standard Magnification Head Maximum Magnification Module Software Options Specifications Dimensional Diagrams VMR-H3030 VMR-3020 VMR-6555 VMR-10080 NWL860T NWT-3000 VMR-H3030 Z120X VMR-3020 Z120X VMR-6555 Z120X VMR-10080 Z120X VMR-C4540 VMR-K3040ZC

Applications LCD glass substrates (pattern measurements) Organic EL glass substrates (pattern measurements) •Automatic measurements of small parts by placing multiple pieces together on the stage •Laser AF achieves high-accuracy measurements of bump heights •Laser AF also enables measurements of height gaps and warping in workpieces •Search function enables measurements of lands and holes of PCBs •Search function also provides accurate measurements even when workpieces are not located properly on the stage •Variety of illumination choices facilitate accurate edge detection even for vague geometries •High-speed stage and high-speed image processing provide high throughput Specifications Stroke (XxYxZ)     With high magnification lens 1000 x 800 x 150 mm (39.4 x 31.5 x 5.9 in.)   With low magnification lens 950 x 800 x 150 mm (37.4 x 31.5 x 5.9 in.) Minimum readout 0.1µm Maximum workpiece weight 40kg (88.2 lb) Measuring accuracy     U1X, U1Y 2 + 4L/1000µm (with a workpiece max. 40kg)   U2XY 3 + 4L/1000µm (with a workpiece max. 40kg) Z-axis (L: Length in mm < W.D.) 11.5 + L/150µm Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD Working distance High mag. objective lens: 9.8mm Low mag. objective lens: 32mm Magnification vs field of view 1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm Auto focus TTL Laser AF and Vision AF Illumination Episcopic, diascopic (with high mag. head only), darkfield illumination Power source AC100-240V±10%, 50/60Hz Power consumption Max. 15A Dimensions & weight     Main unit & table 1530 (W) x 2200 (D) 1750 (H) mm, approx. 1500kg (60.2 x 86.6 x 68.9 in., 3306.9 lb.)   Controller 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.) Footprint 2800 (W) x 2500 (D) mm (110.2 x 98.4 in.) Host Computer Main unit IBM PC/AT (Windows®2000) Monitor 17-in. TFT color *The "Z120X" type is equivalent to the " Z120X" type in Japan. •To request a brochure •For inquiries about these products Measurement Examples High-density PCB LCD Photo mask CCD

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