Nikon
Standard Magnification Head Maximum Magnification Module

VMR-10080

Long 1000 x 800 mm stage stroke provides maximum performance in the measurement of large-size workpieces such as FPD devices.

Applications
Printing masks for substrates
Mother substrates for PCBs
Shadow masks
FPD devices

•Long stage stroke enables measurements of LCD substrates/modules and large-size PCBs
•Laser AF also enables measurements of height gaps and warping in workpieces
•Search function enables measurements of lands and holes of PCBs
•Variety of illumination choices facilitate accurate edge detection even for vague geometries
•High-speed stage and high-speed image processing provide high throughput

Specifications

Stroke (XxYxZ) 1000 x 800 x 150 mm (39.4 x 31.5 x 5.9 in.)
Minimum readout 0.1µm
Maximum workpiece weight 40kg (88.2 lb)
Measuring accuracy  
  U1X, U1Y 2 + 4L/1000µm (with a workpiece max. 40kg)
  U2XY 3 + 4L/1000µm (with a workpiece max. 40kg)
Z-axis (L: Length in mm < W.D.) 1.5 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance 50mm
Magnification vs field of view  
  Optical Head for Type 1 0.5 - 7.5X / 9.33 x 7 - 0.622 x 0.467 mm
  Optical Head for Type 2 1 - 15X / 4.67 x 3.5 - 0.311 x 0.233 mm
  Optical Head for Type 3 2 - 30X / 2.33 x 1.75 - 0.155 x 0.117 mm
Auto focus TTL Laser AF and Vision AF
Illumination Diascopic, episcopic, 8-segment LED ring illumination (inner ring / outer ring)
Power source AC100-240V±10%, 50/60Hz
Power consumption Max. 13A
Dimensions & weight  
  Main unit & table 1530 (W) x 2200 (D) 1750 (H) mm, approx. 1500kg (60.2 x 86.6 x 68.9 in., 3306.9 lb.)
  Controller 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2800 (W) x 2500 (D) mm (110.2 x 98.4 in.)
Host Computer
Main unit IBM PC/AT (Windows®2000)
Monitor 17-in. TFT color

•To request a brochure
•For inquiries about these products
Measurement Examples
Large-size PCB
Large-size PCB
LCD
LCD
LCD
LCD
Metallized patterns of FPC
Metallized patterns of FPC
Laser scan on FPC and its cross section
Laser scan on FPC and its cross section
Height gap profile of FPC
Height gap profile of FPC

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