NEXIV VMR Standard Magnification Head Maximum Magnification Module Software Options Specifications Dimensional Diagrams VMR-H3030 VMR-3020 VMR-6555 VMR-10080 NWL860T NWT-3000 VMR-H3030 Z120X VMR-3020 Z120X VMR-6555 Z120X VMR-10080 Z120X VMR-C4540 VMR-K3040ZC

•The system moves wafers between the FOUP and the VMR-C4540 based on the recipe  that you will create. •Wafers can be put on the stage to measure by an operator.  (200mm and 150mm wafers can be measured only in case of this.) Specifications VMR-K3040ZC+NWT-3000 Dimensions Standard 3108mm(W) X 1300mm(D) X 2010mm(H) Option 3108mm(W) X 1600mm(D) X 2275mm(H) Weight Standard 1600kg Option 1820kg Compatible Wafer 300mm SEMI M1.15-0699 Compatible Wafer (Please consult Nikon beforehand if a wafer whose bow is more than 200μm is required.) Compatible Carrier 300mm SEMI E1.0-0699/E47.1-0999/E62-0999 Compatible Wafer FOUP Load Port 1 LP is standard. (2 LP is optional.) Power Supply Power 200 VAC ±10% / 50/60Hz / Single Phase Electric Current 30 A (Maximum Consumption) Input Terminal ELB101(Terminal Screw M5)/GB101(Terminal Screw M5) Vacuum Vacuum more than -75 kPa / more than 301/min(ANR) Joint (Piping) φ1/4inch tube Swage Lock Safety Standard CE EN61010-1 / EN60204-1 / EN55011 Group 1 Class A / EMC_EN61326-1 / EN60825-1 SEMI SEMI-S2 / -S8 / -F47 Other NFPA79 •To request a brochure •For inquiries about these products

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